Refurbishment Service for Denka-AMAT02 Mini-Module

We provide a refurbishment service for the DENKA AMAT02 module, which is widely used in Applied Materials DR-SEMs and CD-SEMs.

This module features a Schottky thermal field emitter (TFE), suppressor and extractor module. The assembly is available as an exchange service where customers supply the used module. It serves as a direct replacement, equivalent to Denka Part No. AMAT02 and Applied Materials Part No: 0190-A2070.

  1. Easy Exchange Process:
    Simply send us your module, and we’ll handle the rest. Our refurbishment process includes a thorough cleaning, replacement of emitters, and rigorous testing for optimal performance.
  2. Detailed Datasheet Included:
    Receive a comprehensive datasheet with key characteristics, including extractor voltage, angular intensity, total emission current, emitter radius, and tip protrusion.
  3. 12-Month Limited Warranty:
    Enjoy peace of mind with our 12-month limited warranty from the date of installation. We stand behind the quality and reliability of our refurbished emitters.
  4. Tip Customisation Options:
    Tailor your refurbished emitter by specifying the desired tip diameter. We understand the importance of precision in electron microscopy and provide flexible options to meet your specific needs.


Nominal tip radius: 0.5µm. Please specify if other tip radii are required.

Lifetime: 1 year or better, provided the source is operated within guidelines provided by the OEM and never at a pressure > 1 × 10⁻⁹ mbar.