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Philips XL30 SFEG SEM is a field emission scanning electron microscope which is a fully automatic gun configuration. The magnification is up to 800,000X with 2nm resolution. It is easy to use for examining and survey the morphology of the nano devices.
Resolution:
- 1.5nm at 10 kV or higher
- 2.5nm at 1kV
Source:
- Schottky-based thermionic field emission electron gun
- Fully automatic gun configuration control
- Continuously variable beam acceleration voltage range
- Beam current range 1pA~25nA
Specimen Stage:
- Eucentric goniometer:4-axis (X, Y, Z and R ) motorized stage with full manual override
- Tilt range: – 15 ~ 60 degree
- Drawer type entry for specimen exchange
- Specimen chamber diameter 284 mm
Vacuum:
- Automatic vacuum interlock
- One diffusion pump (lower chamber), two ion getter pumps (gun chamber)
- Gun chamber: 2×10-7 Pa
- Specimen chamber: 2×10-5 Pa
- Vacuum regained: < 5 minutes
Scanning System:
- Survey mode, scan mode, and scan rotations
- Magnification rage: 20-80,0000X
Analytical Capability:
- Secondary electron (SE) detector
- Back-scattered electron (BSE) detector